SEM/FIB-SEM Integrated with Raman-Spectometry

The RISE microscope is a novel correlative microscopy technique which combines Confocal Raman Imaging and Scanning Electron Microscopy in a single integrated microscope system. Winner of the prestigious Photonics Prism Award in the metrology category.

This unique combination enables the most comprehensive sample characterization: electron microscopy is an excellent technique for visualizing sample surface structures in the nanometer range; confocal Raman imaging is an established spectroscopic method used for the detection of the chemical and molecular components of a sample.

It can also generate 2D- and 3D-images and depth profiles to visualize the distribution of the molecular compounds within a sample. The RISE Microscope enables for the first time the acquisition of SEM and Raman images from the same sample area and the correlation of ultra-structural and chemical information with one microscope system.

Through Raman imaging and scanning electron microscopy ultra-structural surface properties can be linked to molecular compound information. The RISE Microscope provides all functions and features of a stand-alone SEM and a confocal Raman microscope. Both SEM and Raman are high-resolution imaging techniques with sub-nanometer and diffraction-limited 200-300 nanometer resolution, respectively. In Raman imaging mode the sample can be scanned through a range of 250 µm x 250 µm x 250 µm. RISE Microscopy pairs ease-of-use with exceptional analyzing benefits and is therefore suited to a large variety of applications such as nanotechnology, materials sciences, geology and life sciences.

Main Advantages:

  • Quick and convenient switching between SEM and Raman measurement
  • Automated sample transfer from one measuring position to the other
  • Integrated software interface for user-friendly measurement control
  • Correlation of the measurement results and image overlay
  • No compromise in SEM and Raman imaging capabilities
  • Raman microscopy provides analysis of chemical compounds and material characteristics (stress, orientation, crystallinity).
  • Raman spectroscopy is a complementary method to EDX