Nanoindentation module for AFM-in-SEM LiteScope represents a world's unique solution that enables undertaking in-situ correlative measurements by three different devices at the same time. It allows quantitative analysis of mechanical properties (hardness, Young´s modulus, plastic depth, activation volume) of all kinds of material, precise analysis of nanoindent topography that enables studying the quality of the pile-up and sink-in which can reveal slip-planes or material cracking. The simultaneous use of SEM and AFM allows finding the optimal nanoindentation spot without impurities, cracks or excessive roughness.

The whole device can by attached and detached at any time, offering the choice between regular corelated AFM + SEM measurements or a unique combination of nanoindenter and AFM both in SEM. This combination offers precise control over the experiment, real-time observation of the indentation and detailed AFM analysis of the indented area both before and after the indentation. This lab-on-the-tip approach reduces time spent on transferring the sample between devices and relocating the region of interest.