by Gergely Balogh


Analytical SEM for routine materials characterization, research and quality control applications at the micron scale.

TESCAN VEGA’s 4th generation Scanning Electron Microscope (SEM) with tungsten filament electron source combines SEM imaging and live elemental composition analysis in a single window of TESCAN’s Essence™ software. This combination significantly simplifies acquisition of both morphological and elemental data from the sample, making VEGA SEM an efficient analytical solution for routine materials inspection in quality control, failure analysis and research labs.
TESCAN VEGA features an innovative optics design which guarantees immediate and seamless selection of imaging or analytical conditions whenever required, without need for mechanical re-alignment of any in-column element. With the fully integrated Essence™ EDS, switching from imaging to analytical operation is fast and easy. A single mouse click changes all set-up parameters through the software.

Key Features of TESCAN VEGA

  • Analytical platform featuring fully integrated TESCAN Essence™ EDS, which efficiently combines SEM imaging with elemental composition analysis in a single Essence™ software window.
  • Optimum imaging and analytical conditions immediately available thanks to TESCAN’s unique apertureless design powered by InFlight Beam Tracing™.
  • Effortless and precise SEM navigation on the sample at magnification as low as 2× without the need for an additional optical navigation camera due to the unique Wide Field Optics™ design.
  • Intuitive and modular Essence™ software designed for effortless operation regardless of a user’s experience level.
  • Ultimate safety of the chamber mounted detectors when the stage and sample are in motion is guaranteed with Essence™ 3D Collision model.
  • SingleVac™ mode as a standard feature for observing charging and beam-sensitive samples.
  • Optional vacuum buffer significantly reduces vacuum rotary pump run-time to deliver both ecological and economic benefits.
  • Modular analytical platform which can be optionally equipped with widest selection of fully integrated detectors
    (e.g. CL, Water cooled BSE or RAMAN spectrometer).