High-Resolution Analytical SEM for Large-Scale Materials Characterization
Precision Imaging Meets Large-Sample Capability
The TESCAN MIRA AMU is a next-generation analytical scanning electron microscope (SEM) engineered to tackle the challenges of sub-micron scale analysis on oversized or heavy samples. Built on the proven MIRA platform and enhanced with the Advanced Measurement Unit (AMU), it provides an unmatched combination of ultra-high-resolution imaging, compositional analysis, and robust mechanics — all within an intuitive and modular control environment.
Whether you’re conducting failure analysis, quality control, or materials research, MIRA AMU enables comprehensive morphological and elemental investigation of samples that exceed the limits of conventional SEMs.
Tailored for Oversized and Heavy Specimens
MIRA AMU features a large vacuum chamber and heavy-duty motorized stage that can accommodate samples up to 25 kg and up to 762 mm (30″) in diameter. TESCAN’s Wide Field Optics™ allow navigation at ultra-low magnifications — down to 2× — directly through the SEM, without needing an additional optical camera.
The system also includes 3D collision modeling, LowVac mode for charge-prone or outgassing samples, and optional fully integrated EDS for seamless elemental mapping.
With its powerful electronics, rapid image acquisition, and scripting support, MIRA AMU is the ideal platform for multi-user environments that demand both precision and versatility.
Key Advantages pf TESCAN MIRA AMU
📦 Large Sample Handling
Inspect specimens up to 25 kg and 30” wide with full XYZ stage motion and rotational control.
🔍 Low-Magnification Navigation
Use Wide Field Optics™ to navigate entire large-scale samples at just 2× magnification—no optical camera needed.
🧠 Smart Collision Avoidance
Operate safely with TESCAN’s live 3D collision model, which simulates sample and detector geometry inside the chamber.
💨 Low Vacuum Capability
Analyze beam-sensitive, non-conductive, or outgassing samples using standard LowVac mode (1–700 Pa).
⚙️ Rapid Setup with In-Flight Beam Tracing™
Optimize beam conditions for imaging and analysis in seconds.
🖥️ Intuitive User Interface
TESCAN Essence™ software allows users to tailor the GUI for their experience level, with guided workflows and expert-level control.
📊 Integrated Compositional Analysis
Optional Essence™ EDS module provides real-time spectrum, line scan, and mapping directly in the SEM window.
🧩 Highly Customizable
Equip your system with a wide range of integrated detectors to meet the specific analytical demands of large and complex samples.