The ion coater, SPT-20, is a device used for coating conductive materials (Au, Pt, Pd, Pt-Pd) onto the sample surfaces by using DC sputtering principle. Non-conductive samples are also used for observation under electron microscopes, and they are used to protect the sample surfaces from the injected electron beam and to help the electron flow. It can be used as an electrode formation of thin film type too.
- Digital ion coater
- Vacuum. coating. One touch coating system up to the normal pressure
- Stable coating with coating Current Feedback function
- Can be used with various metal targets
- Uses low-noise rotary pump
Specifications of COXEM Ion Sputter Coater SPT-20
| Dimension & Weight | 420(W) × 220(L) × 230(H)mm, 10kg |
|---|---|
| Power consumption | AC 110 or 220V, 50/60 Hz, 300W |
| Chamber size | Ø100mm |
| Target size | 50mm |
| Target | Au, Pt, Pt-Pd |
| Maximum Ion voltage | 3kV |
| Ion current | 0 ~ 9mA |
| Coating time | 10 ~ 300sec |
| Pump | rotary pump (50L), 14kg |