COXEM EM-40 SEM

COXEM’s New Generation Table-top SEM

The EM-40 represents COXEM’s latest addition to their expanding family of Tabletop SEMs. The EM-40 comes with ultra-fast 5th-generation signal processing technology and provides high-quality imaging at frame rates of up to 13 fps. Four imaging modes (Fast, Slow, UltraFast, and Photo) allow the user to choose the image quality and speed that best fits their application.

  • All-new GUI, NanoStation5
  • Fast frame rate up to 13fps
  • Optimized auto focus function
  • X, Y, Z axes motorized stage
  • Variable pressure (10, 20, 30Pa)
  • Compatible with compact EBSD
  • Fast particle analysis

Specifications of COXEM EM-40 SEM

Electron gun

Tungsten filament (W)

Spatial resolution

< 5nm

Magnification

13x to 250,000x

Accelerating voltage

1 ~ 30kV

Sample stage

X : 40mm, Y : 40mm, Z : 40mm,

3-axis motorized

DetectorSE, BSE*

Vacuum mode

HV, LV*, VP*

Vacuum system

Turbo pump (80L) + Rotary pump (100L)

Dimension (W × L × H)

315(W) × 560(L) × 580(H)mm

Weight

81.5 kg

Features

Panorama 2.0

Auto focus

1 Second auto brightness & contrast

Auto start

Signal mixing

Triple display & Save

Line profiling

Image filtering

Annotation tool

ChamberCam

Data output format

JPEG, TIFF, BMP

Options*

BSE, EDS, EBSD, STEM

NaviCam, Coolstage

LV (20Pa), VP (10 / 20 / 30Pa)

NanofiberScanner

Diaphragm pump